Ρυθμιστές Ροής Μάζας
Οι Ρυθμιστές Ροής Μάζας (MFCs) της MKS προσφέρουν υψηλή ακρίβεια και αξιοπιστία στον έλεγχο της ροής αερίων, καλύπτοντας απαιτητικές εφαρμογές όπως η παραγωγή ημιαγωγών, η χημική επεξεργασία και η επιστημονική έρευνα. Υποστηρίζουν ευρύ φάσμα αερίων και ρυθμών ροής, προσφέροντας ευελιξία και απόδοση σε κάθε διαδικασία.
Mass Flow Controllers
Enabling Productivity Through Flow Control Innovation
MKS offers a comprehensive portfolio of high-performance Mass Flow Controllers (MFCs) designed to deliver exceptional precision and reliability in regulating gas flow rates. These innovative instruments are ideal for a wide range of applications in various industries, including semiconductor manufacturing, chemical processing, and research laboratories.
MKS MFCs utilize advanced technologies to ensure accurate and repeatable gas flow measurement and control. They are available in a variety of configurations to accommodate diverse flow rate requirements and gas compatibilities. Whether you require precise control of air, nitrogen, hydrogen, or other specialty gases, MKS has the MFC technology to suit your specific needs.
G-Series Fast and Repeatable Mass Flow Controllers
G-Series Mass Flow Controllers are cost-effective thermal flow controllers with fast and repeatable performance that are well suited for most industries and applications.
P-Series High Performance Mass Flow Controllers
P-Series High Performance Multi-gas, Multi-range Thermal Mass Flow Controllers are designed for the most critical process applications where accuracy, repeatability, and pressure insensitivity are essential requirements.
C-Series Compact, Ultrafast Mass Flow Controllers
C-Series Mass Flow Controllers (MFC) are compact, fast-response models utilizing a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. They are available in Full Scale flow rates from 15 to 14,000 sccm (N₂), with a control range from as low as 0.1% to 100% of Full Scale. Analog (0 to 5 VDC), RS485, PROFINET®, and Modbus communication interfaces are available.
High Flow Mass Flow Controllers
High flow thermal mass flow controllers and meters offer both elastomer and metal seals for flow rates up to 300 slm. Versions are available for both standard and harsh environments, where protection from water and dust is required.
Legacy Mass Flow Controller
The 1179C is a general-purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 Mass-Flo® controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control down to 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.
➡️ Flow ranges from 10 sccm to 20 slm
➡️ Patented sensor design provides exceptional zero stability
➡️ Fast warm-up time minimizes expensive production downtime
➡️ Compatible with earlier MKS MFC and power supply/readout modules
ΠΑΡΟΜΟΙΑ ΠΡΟΪΟΝΤΑ
