Flow Ratio Controllers
Flow Ratio Controllers (FRCs) from MKS are designed for precise, uniform distribution of multiple gas streams from a single source, ideal for applications like semiconductor fabrication, flat panel display production, and solar cell manufacturing.
Flow Ratio Controllers
Precise and Uniform Distribution of Multiple Gases Within a Chamber
For processes requiring precise and uniform distribution of multiple gases within a chamber, MKS offers a pioneering line of DELTA™ Flow Ratio Controllers (FRCs). These innovative instruments are designed to meticulously control and split a single gas source into various streams, ensuring consistent flow ratios across multiple channels. This capability is crucial in various industries, including semiconductor fabrication, flat panel display production, and solar cell manufacturing.
MKS FRCs leverage advanced control algorithms and robust valve technologies to maintain precise flow ratios even under fluctuating pressure or temperature conditions. They offer a wide range of dynamic control capabilities, allowing for rapid adjustments to flow rates as needed. This ensures optimal process uniformity and repeatability, leading to superior product quality and yield.
DELTA™ Series Mass Flow Ratio Controllers
The DELTA™ series mass flow ratio controllers divide and control mixed process gas flows to either multiple chambers or zones within a process chamber at proportions specified by the user to optimize process uniformity and repeatability. DELTA™ series flow ratio controllers, with their superior performance and compact design, are the latest offering from MKS, the industry leader in flow ratio control.
➡️ Accurately and repeatably control flow ratio for better process optimization
➡️ Digital control loop provides rapid response to channel set point independent of the gas mix
➡️ Uses standard web browser with no special software required
DELTA™ II 2-zone Flow Ratio Controller
DELTA™ III 3-zone Flow Ratio Controller
DELTA™ IV 4-zone Flow Ratio Controller
