Mass Flow Meters
MKS Mass Flow Meters (MFMs) deliver high-precision, reliable gas flow measurement across a wide range of gases and flow rates, meeting the demands of diverse industrial applications. Built with innovative technology, they ensure exceptional accuracy, repeatability, and long-lasting performance even in challenging environments.
Mass Flow Meters
Enabling Productivity Through Flow Control Innovation
Ensuring accurate and reliable measurement of gas flow rates is crucial for a variety of industrial processes. MKS offers a comprehensive range of high-precision Mass Flow Meters (MFMs) designed to meet the demanding needs of diverse applications. Their MFM portfolio caters to a wide spectrum of flow rates and gas compatibilities, ensuring you can find the perfect solution for your specific needs.
MKS Mass Flow Meters leverage innovative technologies to deliver exceptional accuracy and repeatability. Whether you require precise measurement of air, nitrogen, hydrogen, or other specialty gases, MKS has the MFM technology to suit your application. Furthermore, their meters are known for their durability and reliability, providing long-lasting performance in even the most challenging environments.
G-Series Mass Flow Meters
G-Series Mass Flow Meters are cost-effective thermal mass flow meters with fast and repeatable performance that are well suited for most industries and applications.
P-Series High Performance Mass Flow Meters
P-Series High Performance Multi-gas, Multi-range Thermal Mass Flow Meters are designed for the most critical process applications where accuracy and repeatability are essential requirements.
C-Series Compact, Ultrafast Mass Flow Meters
The C-Series CMA10B Mass Flow Meter (MFM) is a compact, fast response model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 15 sccm to 14,000 sccm, N₂, with flow measurement from as low as 0.1% up to 100% of Full Scale. Communication interfaces include analog (0 to 5 VDC) and digital (RS485, PROFINET®, or Modbus TCP/IP). The required power supply voltage is 24 VDC nominal.
➡️ Ultrafast response time of <100 msec
➡️ Measurement range from 0.1-100% of Full Scale
➡️ Embedded web browser for setup and diagnostics
High Flow Mass Flow Meters
MKS high flow thermal mass flow meters offer flow rates up to 1000 slm and are designed for harsh environments requiring protection from water and dust.
Legacy Mass Flow Meter
The 179 is an all-metal mass flow meter designed to measure the flow of gases in a wide variety of applications. 179 Mass-Flo® meters are available with Full Scales from 10 sccm to 20 slm, providing fast, repeatable flow metering down to 0.1 sccm. The 179 is a direct form-fit-function replacement for the most common MFMs on the market today.
➡️ Flow ranges from 10 sccm to 20 slm
➡️ Patented sensor design provides exceptional zero stability
➡️ Percent of Full Scale accuracy for analog configurations
